maintains proper balance and performance over
Contamination and static attraction issues result
in yield and reliability losses that have traditionally been considered “a part of doing business.”
However, with a relatively simple and reasonable
static control program, many of these issues can be
resolved and prevented.
For the full article, visit cemag.us.
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Out For Electrostatic Attraction.” Solid State
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of Sub-micron Aerosol Particles in Integrated
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3. Staper, C.H.; R.J. Rosner. “Integrated Circuit
Yield Management and Yield Analysis:
Development and Implementation.” IEEE
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Vol. 8, pp. 95-102.
4. Long, C; J. Peterman; L. Levit. “Implementing
a Static Control Program to Increase the
Efficiency of Wet Cleaning Tools.” MICRO. Jan.
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Manufacturing Foreign Material Reduction
Initiative.” IEEE Transactions on Semiconductor
Manufacturing. Vol. 21, Issue 3. Aug. 2008.
Christopher Long is a Senior Engineer with IBM
Research. Larry Levit is the owner of LBL Scientific. Carl
Newberg is President of MicroStat Laboratories. The
authors are all ESD Association members and active
Fig. 1: Particles on a neutral wafer.
Fig. 2: Particles on a charged wafer.