directly in the room. Some technologies create larger droplet size
that may wet or create condensation on sensitive equipment.
Adiabatic humidifiers that can be installed inside the duct:
• De-correlationa atomizing can be installed in the duct and
on the wall.
• Air atomizer, high pressure water, ultrasonic, and wet media
all need special ducts with a drain and fan.
The humidification system must not introduce any mineral
or particulates into the space.
When water evaporates any minerals present in the water can
shoot out as “white residue” dust. To avoid this, install a water
filter system. De-correlation air atomizing technology, air atomizing types, and high pressures system can use a filtered water
system. For humidifiers using compressed air, there must be air
filters installed inline to filter any particulates or oil from the
compressed air going into the nozzle.
What is the annual maintenance cost involved?
If the cleanroom requires 24/7 ESD control, choose a humidifier that does not require a system shut-down to conduct
maintenance. Sizing the system correctly and injecting the
correct capacity of water into the air ensures correct relative
The minimum required humidity for eliminating ESD is
30%. However, if you are already installing a humidification
system, why not use it to make better conditions for the people
who work in the space all day? Maintaining 50% relative
humidity level can make the human body feel better and be
The key condition for the adiabatic humidifier to achieve
100% ESD elimination is the ability to maintain non-fluctuating humidity. The humidity level should not fluctuate more
than plus/minus 1% throughout the controlled environment.
Wetting and condensation causes fluctuation and uneven
humidity levels and should be avoided. Maintaining the exact
amount of water content in the air at all times will ground all
the charges and maintain a static-free environment.
Ido Goldstein is Chief Engineer at Smart Fog Inc. He has over
20 years of experience in the humidification market.
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